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Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings.

  • Book Description.
  • 30.113 Design and Fabrication of Microelectromechanical Systems (MEMS).
  • Dreaming the Divine: Techniques for Sacred Sleep;
  • Equal Recognition: The Moral Foundations of Minority Rights.
  • About MEMS!
  • Introducing Fortran 95.
  • The history of the calculus and its conceptual development.

This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations.

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Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline. Show more.

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This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication. MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world.

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